Description
The ZYGO ZMI-4104 is an industrial high-end 4-axis interferometry measurement board belonging to ZYGO’s premium ZMI™ 4100 series precision metrology system. Designed for sub-nanometer level displacement positioning and dynamic motion detection, this VME64x bus-based measurement electronics board serves as the core data acquisition and processing unit matched with ZYGO dual-frequency laser interferometer systems. Featuring multi-axis synchronous measurement capability, ultra-high resolution, excellent real-time response and industrial modular design, it supports long-term stable operation in ultra-precision manufacturing and laboratory metrology environments, widely deployed in high-end precision positioning equipment, semiconductor lithography platforms and automated precision machining systems.
ZYGO ZMI-4104
Physical Specifications (Dimension & Weight)
The ZMI-4104 adopts a standard industrial VME64x board form factor with integrated circuit layout and rigid anti-vibration structural design. It supports modular chassis installation, enabling flexible system expansion and neat cabinet layout while maintaining excellent structural stability during high-precision dynamic measurement.
Overall Dimensions (L × W × H): 340 × 233 × 30 mm (13.39 × 9.17 × 1.18 inches)
Net Weight: 1.25 kg (2.75 lbs)
Installation Standard: Standard VME64x chassis modular card slot mounting
Structural Feature: Reinforced PCB anti-deformation design, anti-shock and anti-interference layout
Board Grade: Industrial-grade high-rigidity printed circuit board for continuous industrial operation
Core Measurement & Performance Technical Parameters
Equipped with ZYGO exclusive interferometric signal processing algorithm and high-speed data acquisition chip, the ZMI-4104 delivers industry-leading sub-nanometer measurement accuracy and multi-axis synchronous computing capability, fully meeting ultra-precision industrial metrology standards.
Supported Measurement Axes: 4 independent synchronous measurement axes per board
Ultimate Measurement Resolution: Sub-nanometer level ultra-high resolution
Maximum System Expansion: Support up to 64 measurement axes via multi-board cascading
Signal Processing Mode: Real-time heterodyne laser interferometry signal demodulation
Dynamic Response Speed: High-speed real-time data refresh for dynamic motion tracking
Measurement Stability: Ultra-low long-term drift, ensuring repeatable precision data output
ZYGO ZMI-4104
Bus & Interface Configuration Parameters
This measurement board adopts mature industrial bus architecture and standard universal interfaces, realizing seamless matching with ZYGO laser heads, upper industrial control systems and data acquisition platforms, supporting high-efficiency data transmission and system linkage control.
Bus Protocol: Standard VME64x industrial high-speed parallel bus
Compatible Laser Heads: Perfectly matched with ZYGO 7702 and ZMI series dual-frequency laser heads
Data Output Method: Real-time digital position data output
System Compatibility: Fully compatible with ZYGO professional measurement software and industrial control hosts
Electrical Working Parameters
Optimized for industrial continuous working conditions, the ZMI-4104 features stable power supply adaptation, low operating power consumption and strong circuit anti-interference performance, supporting 24/7 uninterrupted high-precision measurement operation.
Rated Power Supply: Standard industrial VME bus power supply input
Operating Power Consumption: Low-power high-efficiency circuit design
Anti-Interference Grade: Industrial-grade EMC electromagnetic interference suppression
Environmental Adaptability & Industrial Grade Parameters
Tailored for high-precision industrial workshops and professional laboratory environments, the ZMI-4104 features strict temperature and humidity adaptability and excellent environmental stability, ensuring consistent measurement accuracy in complex working conditions.
Long-Term Stable Operating Temperature Range: 0°C to +70°C
Storage Temperature Range: -20°C to +80°C
Maximum Tolerable Humidity: 95% Non-Condensing Relative Humidity
Environmental Resistance: Anti-vibration, anti-electromagnetic interference, dust-proof industrial grade performance
ZYGO ZMI-4104
Intelligent Safety & Stability Mechanisms
The board integrates multiple built-in circuit protection and data stability mechanisms to avoid data distortion, circuit failure and measurement errors caused by power fluctuation, signal interference and environmental changes, ensuring long-term reliable operation of precision measurement systems.
Overvoltage & Undervoltage Protection: Automatic power supply anomaly detection and circuit locking
Signal Error Correction: Real-time data filtering and error compensation function
Overload Protection: Intelligent current limiting to protect internal high-precision chips
Data Anti-Disturbance: Built-in signal shielding design to eliminate external electromagnetic interference
Product Advantages & Application Scenarios
The ZYGO stands out with its 4-axis synchronous high-precision measurement capability, sub-nanometer resolution, modular expandable design and excellent system compatibility. The standard VME64x bus structure simplifies system integration and multi-board cascading expansion, greatly improving the flexibility of multi-axis precision measurement systems. With ultra-stable data output and strong environmental adaptability, it effectively guarantees the accuracy and repeatability of ultra-precision positioning and displacement detection, reducing system calibration frequency and long-term maintenance costs.
It is widely applied in semiconductor lithography equipment, ultra-precision CNC machining positioning systems, high-end laboratory optical metrology, precision automation assembly platforms, and scientific research high-precision displacement monitoring fields. All products undergo strict factory precision calibration and aging testing, equipped with a 12-month official warranty, providing core reliable measurement guarantee for high-end industrial and scientific precision systems.
