Description
Brand: AMAT
Model: 0010-23716
System Name: Valve Actuator, also recognized as Vacuum Valve Driver, Gas Control Actuator and Semiconductor Equipment Valve Control Unit, integrating precise valve control and gas switching functions for semiconductor manufacturing systems
Place of Origin: USA
Shipping Location: China (in-stock products are shipped from China, supporting worldwide delivery)
Warranty Period: 365 days
AMAT 0010-23716
Product Overview
The AMAT 0010-23716 is a high-precision valve actuator specially designed for semiconductor manufacturing equipment, particularly for gas flow control systems in processes such as CVD, PVD, and Etch[1]. It adopts a compact and robust structural design, combining precise drive control and stable operation performance to provide reliable support for the opening and closing control of vacuum valves or gas valves in semiconductor vacuum systems. As a key component of AMAT semiconductor manufacturing equipment, this product ensures high-speed and accurate gas switching, perfectly matches MFC (Mass Flow Controller) and pressure control systems, and supports operation in high vacuum or ultra-high vacuum environments, widely used in semiconductor chip manufacturing and related high-precision industrial fields[1][2].
Core Functions
- Precise Valve Control: Serves as the drive unit for vacuum valves or gas valves, realizing precise control of the opening and closing state of process gases (such as argon, fluoride, nitrogen), ensuring stable and controllable gas flow in semiconductor manufacturing processes[1].
- High-Speed Gas Switching: Enables rapid and accurate switching of process gases, matching the rhythm of semiconductor manufacturing processes, improving production efficiency and ensuring process stability[1].
- Vacuum Environment Adaptability: Specially designed for high vacuum or ultra-high vacuum environments, with excellent sealing and pressure resistance, ensuring stable operation in the harsh vacuum conditions of semiconductor equipment[1].
- System Compatibility: Seamlessly cooperates with MFC (Mass Flow Controller) or pressure control systems, realizing coordinated control of gas flow and pressure, and ensuring the stability of semiconductor manufacturing processes[1].
- Stable Operation: Adopts high-quality drive components and anti-interference design, effectively resisting electromagnetic interference and voltage fluctuations in industrial environments, ensuring long-term stable and fault-free operation[1][2].
- Easy Integration & Maintenance: Compact structural design, easy to install and integrate into AMAT semiconductor equipment (such as CENTURA® and Producer® Etch systems), and convenient for disassembly, inspection and replacement, reducing maintenance time[1].
AMAT 0010-23716
Technical Parameters
| Parameter Category | Specifications |
| Power Supply | 24 VDC (typical, stable voltage input, low ripple) |
| Power Consumption | Maximum 7.5 W |
| Control Type | Precise on-off control, gas switching control |
| Interface Type | Standard industrial interface, fully compatible with AMAT semiconductor equipment |
| Operating Temperature | -20 °C to +60 °C (industrial grade operating temperature range) |
| Storage Temperature | -40 °C to +85 °C |
| Humidity Level | 0% – 95% RH (non-condensing, no moisture damage) |
| Protection Rating | IP20 (inside the cabinet, dust-proof and anti-contact) |
| Compatibility | Fully compatible with AMAT Etch, CVD, PVD systems and MFC pressure control systems[1] |
| Working Environment | High vacuum or ultra-high vacuum environment |
Specifications
- Dimensions: Standard: 85 mm × 120 mm × 45 mm (compact actuator design, specific dimensions depending on configuration)
- Weight: Lightweight design, 0.25 kg – 0.35 kg (standard version)
- Structure: Robust and compact structural design, suitable for installation in semiconductor equipment vacuum systems, easy to install, replace and maintain
- Warranty Period: 365 days
- Product Status: Original new, factory-sealed, in stock, available for same-day shipping from China
- Component Quality: Adopts high-precision drive components and sealing materials, resistant to mechanical stresses, wear, and vacuum environment corrosion, compliant with semiconductor industry strict standards[1][2]
- Packaging: New and original with factory-sealed packaging, professional anti-static bag and shock-proof packaging for transportation protection
AMAT 0010-23716
Application Fields
The AMAT 0010-23716 is widely applied in high-precision semiconductor manufacturing scenarios, including but not limited to:
- Semiconductor Manufacturing: Used in semiconductor chip manufacturing processes, serving as the core valve drive component for Etch systems (such as CENTURA® and Producer®), CVD/PVD equipment, ALD, RT-CVD or PECVD equipment[1].
- Vacuum System Control: Applied in semiconductor equipment cavity vacuum pressure control loops, responsible for the opening and closing control of vacuum valves to maintain stable vacuum environment[1].
- Gas Flow Control: Suitable for gas replacement and cleaning systems in the back-end process section of semiconductor manufacturing, realizing precise control of process gas switching[1].
- Semiconductor Equipment Supporting: Used as a supporting component for AMAT semiconductor equipment, matching MFC and pressure control systems to ensure the stability of the entire production process[1][2].
